Are metals like Au, Ag or Cu usually used in MEMS-based technologies?

08 June 2021 1 7K Report

Are metals like Au, Ag or Cu usually used in MEMS-based technologies?. I would like to know what kinds of metals are usually used for the development of modern MEMS-based technologies (or components in this area). Are the electrical properties of MEMS components as important as the mechanical ones?. Any commentary is welcome.

Shankar Dutta

Au layer is used in RFMEMS switches due to its excellent electrical conductivity and negligible chance of getting oxidized. Cu is used for metal interconnects. Ag is being used by few researchers for SERS and metal assisted silicon nanowire formation.

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