The contacts are the key to any conductivity measurement. Why do not want to damage the film. I suggest sacrificing a film or a part of the film for the measurement using conductive paint electrodes or spuu i conductive conductive conductivr

Make a soft electrode like this work. (Electroluminescence measurement of microscale light-emitting diode wafers using a three-dimensional flexible probe head | Nature Electronics)

Geoffrey R Mitchell I highly appreciate your response, actually concern is not about film damage, the film when analyzed using multimeter shows resistance of few ohms, while using 2636B it drastically increased from few ohms to Mega and Gega ohms. This indicates that the probes reached bottom insulating layer rather than just grasping upper conductive layer.

Shifan Yu Thanks for your recommendation, I will check it out.

Dear Ayesha Sabir , try, please, to measure EIS[1] with electr. contacts proposed by Geoffrey R Mitchell [2].

1. A simple PZT transducer design for electromechanical impedance (EMI)-based multi-sensing interrogation https://link.springer.com/article/10.1007/s13349-020-00449-6

2. The electr. contacts are 'the key' to any electr. conductivity measurement.

I will try, thanks for your kind suggestion sir Ioannis Samaras