Yi Jia | Beginner

Yi Jia

3 Questions 4 Answers 0 Followers

Questions related from Yi Jia

For ULK film UV cure process (2KA~5KA), will it form a vertical component gradient? Any characterization method or reference paper?

ULK UV curing

02 February 2017 1,675 0 View

How to control the particle contamination on wafer during ALD（atomic layer deposition）process？ What level the main ALD suppliers reach? ASMI, AM?

semiconductor, ASM, Applied Materials

12 December 2015 9,108 5 View

Does the shape of electrostatic chuck affect the film deposition (selective-deposition) during the CVD process?

PECVD, Semiconductor industry, IC

09 September 2015 1,035 3 View