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I am coating Al2O3(TMA precursor, 100nm) on Ag(lift off using LOR, 100nm Ag on 1um SiO2), the patterned Ag looks clean after lift off (both under SEM and dark mode OM), but the surface get stained...
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I need to measure some pores of sub-5nm size, but these membrane is fragile and can not be made sampe for TEM, also I can not see it clearly with SEM. Is there any better way to measure these...
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