Hi ! Any idea how to wet etch amorphous silicon (a-Si:H) without damaging Al pads and needing to protect them ?

400 nm Al pads on 200nm a-Si:H on c-Si. I just want to remove the a-Si:H and do not care about roughness of the c-Si substrate. Method should be cheap and easy to handle.

06 June 2017 328 3 View