Salahuddin Nur

6 Questions 8 Answers 0 Followers

Questions related from Salahuddin Nur

There are several companies who offers 100 kV EBL systems. How to really evaluate which one is the best considering the budget is not an issue?

Hi, We are planning to buy a 100 kV EBL for our cleanroom. There are several companies who offer such systems and for similar spec price varies considerably. So, it a bit difficult to choose an...

04 March 2016 869 1 View

How does/can thermal annealing effect uniformly doped silicon?

Hi, I am using a chip from a silicon substrate uniformly doped with phosphorus (~10E15 cm-3) to make devices by FIB milling. After milling I am using thermal annealing for treating the damages....

26 October 2015 8,602 2 View

How are the RF power, self bias voltage and electrode size related in Reactive Ion Etching system?

Hi, I am trying to adopt an anisotropic silicon etch recipe to Oxford NGP80 RIE machine. The Original recipe has been optimised for a different machine (NEXTRAL 330 RIE parallel plate plasma...

08 September 2015 2,444 4 View

Can I expect same/similar results for 2D and 3D FDTD simulation as the ones from the simulation of very High-Q photonic crystal cavities?

Hi, I need to realise/fabricate very high-Q photonic crystal cavities in silicon for my PhD project. The cavities should be optimised for certain wavelength range (around 1078 nm). I am trying...

06 July 2015 2,034 4 View

Can anybody help me with anisotropic silicon dry etch with oxide as a mask?

Hi, I want to transfer feature (array of holes, diameter - 140 nm) from 110nm SiO2/hard cured HSQ layer to 220 nm silicon layer of SOI wafer. I need good anisotropic etch. I am using a Oxford RIE...

05 June 2015 4,734 3 View

Can anyone please suggest what will be curved element dose relation with energy and aperture on Raith 150 Two Electron Beam Lithography system?

I am trying to pattern array of holes (diameter 140 nm) with 20 KeV & 20 um aperture. Shall I use curved element dose in addition to area dose? If yes, I am using area dose of 230 then what...

11 February 2015 5,940 6 View