Saeedeh Soleimani

2 Questions 2 Answers 0 Followers

Questions related from Saeedeh Soleimani

How we can investigate the resistance of AlN thin films is good enough to get a high piezo property material?

Hello, I would like to ask the possibility of failure piezo properties performance of AlN thin film deposited by reactive sputtering? I have good ellipsometry, XRD & SEM results but poor...

06 June 2019 8,970 5 View

Target failure to produce/keep plasma

Hello, I have used Al target to deposited AlN with Ar & N2. However, it seems the target is failed to produce plasma. I don't have any power and it happened suddenly. There is no forward...

01 January 1970 3,718 1 View