Is there any reference for fabrication of a semi-cylindrical dielectric over a semiconductor(Si) substrate? If not, what may be the proposed fab flow?

For example, a cuboidal Silicon substrate with semi-cylindrical deposition on top if viewed in 3D. Can an omega shaped FinFeT be taken as a reference for such devices, where the ratio of the width...

17 August 2016 4,183 3 View