2 Questions 2 Answers 0 Followers
Questions related from Pengyuan Wu
I got some troubles about deposite SiNx or BN on silicon wafer. The main parameters I used was shown below: SiNx: DC current: 150/250 mA, Power is 50/80W Gas: 10/10 sccm Ar/N2, and pressure: 2.0...
09 April 2023 2,322 3 View
The spectra just contains signal of substrate, such as Si and glass, without signal of BN. How can I get right Raman spectra?
09 November 2022 2,035 2 View