Pengyuan Wu

2 Questions 2 Answers 0 Followers

Questions related from Pengyuan Wu

Is silicon substrate easy to be etched during sputtering process?

I got some troubles about deposite SiNx or BN on silicon wafer. The main parameters I used was shown below: SiNx: DC current: 150/250 mA, Power is 50/80W Gas: 10/10 sccm Ar/N2, and pressure: 2.0...

09 April 2023 2,329 3 View

How to avoid the influence of substrate when getting the Raman spectra of transparent BN caotings?

The spectra just contains signal of substrate, such as Si and glass, without signal of BN. How can I get right Raman spectra?

09 November 2022 2,039 2 View