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Questions related from Nils Andreas Dittmar
So what I did, was that I have a Si-wafer with a 100 nm thick SiO2. In an ICP reactor I induced for 1 second C4F8 and Ar (1:1), after that i evacuated the chamber with pure Ar for 20 s. I expected...
04 April 2018 5,189 1 View