Lukas Engel

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Questions related from Lukas Engel

Why does an evaporation silanization of a patterned Si-wafer sometimes lead to streak-like features (= inhomogeneous silanization)?

we use (Tridecafluoro-1,1,2,2-tetrahydrooctyl)trichlorosilane; 97% from abcr evaporation silanization is performed in an exsiccator which has been flushed with Ar prior to evacuation

11 April 2019 3,355 4 View

Why does an evaporation silanization of a patterned Si-wafer sometimes lead to streak-like features (= inhomogeneous silanization)?

we use (Tridecafluoro-1,1,2,2-tetrahydrooctyl)trichlorosilane; 97% from abcr evaporation silanization is performed in an exsiccator which has been flushed with Ar prior to evacuation

04 April 2019 4,401 3 View