Lukas Engel

3 Questions 2 Answers 0 Followers

Questions related from Lukas Engel

How to remove cross-linked silane from a patterened Si wafer?

we use (Tridecafluoro-1,1,2,2-tetrahydrooctyl)trichlorosilane; 97% from abcr evaporation silanization was performed in an exsiccator which has been flushed with Ar prior to evacuation to drive out...

27 February 2020 8,485 3 View

Why does an evaporation silanization of a patterned Si-wafer sometimes lead to streak-like features (= inhomogeneous silanization)?

we use (Tridecafluoro-1,1,2,2-tetrahydrooctyl)trichlorosilane; 97% from abcr evaporation silanization is performed in an exsiccator which has been flushed with Ar prior to evacuation

11 April 2019 3,377 4 View

Why does an evaporation silanization of a patterned Si-wafer sometimes lead to streak-like features (= inhomogeneous silanization)?

we use (Tridecafluoro-1,1,2,2-tetrahydrooctyl)trichlorosilane; 97% from abcr evaporation silanization is performed in an exsiccator which has been flushed with Ar prior to evacuation

04 April 2019 4,433 3 View