How to cut a sample with several micrometers thick silicon oxide with DISCO DAD323 dicing machine?

I use a DISCO DAD323 dicing machine to cut my sample,which has 1-2 micrometers SIO2 on its top.However,the SIO2 is broken and fall apart everytime.I tried different cutting speed but didn't work....

21 June 2024 1,004 0 View