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Questions related from Lee Khwangsun
i make nanosheet FET, channel doping is 1e16 boron and S/D doping 1e20 arsenic. When only SDE is used, a normal doping profile is seen, but when SDEVICE is used, a strange phenomenon is found...
18 June 2021 9,836 0 View
Comsol is investigating deformation due to gravity. Gravity is applied to the nanosheets to check for displacement and stress. If I input the Young's modulus of the channel to about 1 [GPa], the...
16 February 2021 7,375 3 View
