Can anyone have an idea, what is the suitable etchant for wet etching amorphous silicon, especially on multi-crystalline silicon surface ?

In my process, I want to remove amorphous silicon layer on multi-crystalline silicon surface. The setup I have is wet etching process. The recent data I have had shown HF+HNO3+H2O is not a good...

05 May 2017 1,872 2 View