Joong-Seon Choe

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Questions related from Joong-Seon Choe

How to prevent silica PLC VOA from microheater open?

I made variable optical attenuator using silica PLC with mach-zehnder structure. microheater(Ti/Au) was deposited on interferometer arms, and deep trench was formed near the microheater for...

14 March 2024 7,523 0 View

How can I remove Cr etch mask on Au layers?

I made evaporated Cr/Au patterns through lift-off process on silica on Si. Then, I sputtered Cr on the wafer and pattered the Cr layer for SiO2 dry etch mask formation. Cr/Au was for heater on...

27 January 2022 1,032 2 View