Why the C continue to increase in the accumulation area in the C-V curve?

Si/Al2O3(7~8nm)/Mo Al2O3 ALD 200℃ 50cycle, I know that the quality this dielectric film is not good. F 10kHz, AC level 30mV C continues to increase and does not saturate in the accumulation...

31 January 2024 5,349 1 View