Hyungju Rah

2 Questions 1 Answers 0 Followers

Questions related from Hyungju Rah

Whant polymer remains after Reactive Ion Etch(RIE) process are there and how can I remoce it?

I'm trying to etch TiO2 film by RIE. There is 200nm thick photoresist(Shinetsu, SEPR-701) structure, under that there is bulk Anti reflection coat layer(Brewer science, DUV-252) of 100nm,...

11 August 2021 4,976 2 View

How can I increase roughness of TiO2 film?

I'm trying to increase roughness of TiO2 film. I purchased TiO2 films(thickness around 350nm) and I would like to increase roughness of film. Currently it shows roughness of 1nm. I want to control...

26 October 2017 7,997 4 View