Huan-yu Shih

3 Questions 3 Answers 0 Followers

Questions related from Huan-yu Shih

How to measure the film thickness on sapphire substrate by spectroscopic Ellipsometer?

there's no problem to measure the nano-scale film thickness on Si substrate But when the film was deposited on sapphire (single-side polished) the intensity become weak and the data was...

21 June 2016 4,204 2 View

The XRD intensity enhanced but FWHM remain the same. Was the FWHM limited by the film thickness?

In my study, I used annealing treatment to improve the crystallinity of thin films. After annealing, the XRD intensity (the (0002) peak in theta two-theta mode) enhanced dramatically but the FWHM...

30 May 2016 8,357 5 View

What cause satellite peaks in XRD measurement?

the figure show the XRD theta-two theta measurement of ~30nm (0002) AlN thin film on (0001) sapphire. As shown in figure, there are some satellite peaks around (0002) AlN peak. what cause these...

24 May 2016 1,000 21 View