Himanshu P. Patel

2 Questions 6 Answers 0 Followers

Questions related from Himanshu P. Patel

Best method to test the thickness of a Co layer that I have in the patterned stack wafer over a silicon substrate.

Please find the Image of the Co layer that is layered on SiO2 Substrate and above it we have ECD process of Cu. the layer thickness is between 10-30 nm If I want to measure/ qualitfy the Thickness...

06 June 2017 3,920 6 View

Measurment of Thickness and Porosilty of a thin film on a structured wafer / Trenches of Silicon based wafer with Ellipsometric Porosimetry

I am trying to measure the the thickness of Co layer (

06 June 2017 6,925 3 View