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Metroology method scanning big areas ~ 10" scale to detect Cu residuals in a metal layer compound with Ni/Auf surface finishing
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Conventional light sources have a penetration depth of a few nanometers in metal layers and cannot be used for spectroscopic ellipsometry purpose to measure layer thicknesses of a few 100 nanometres.
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Due to instant dissipation of heat in conducting wire cracks, ohmic resistance of 2nd harmonic of an AC current shows zero phase shift to temperature of the generated heat wave. Following the same...
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