Emre Kurtoglu

3 Questions 3 Answers 0 Followers

Questions related from Emre Kurtoglu

What could be the reasons of arcing and surface contamination on Aluminum target in DC magnetron sputtering process?

Dear all, I made a simple lowcost sputter test setup. The purpose of this is to gain some knowledge and feeling of the methode and to know how to work with its parameters. My target is to...

04 February 2020 5,747 4 View

Is it possible to sputter with non-pure Aluminum or Copper alloys?

I know that materials with high purity are used for the PVD processes. But I would like to know if there is a possibility to magnetron sputter with daily life alloys like AW-6060 Aluminium (+-...

08 January 2020 3,877 8 View

How can I protect a turbomolecular pump from sucking Aluminium vapor in a thermal evaporation process?

I know that in small laboratory setup's for thermal evaporation, a shield is foreseen around the inlet of the turbomolecular pumps in the vacuum chamber. This way a direct gas suction from the...

11 December 2019 4,798 2 View