How to correctly simulate deposition which shows induced defects and dislocations (if any due to deposition) in Silvaco ATHENA TCAD tool ?

I am trying to simulate the deposition of Silicon over SiO2. In reality, when we try to deposit a crystalline Silicon over SiO2 (amorphous), we get rather a polycrystalline Silicon. In ATHENA...

11 November 2019 4,113 4 View