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Usually on SiO2/Si substrate, I usually 30nm Ti as adhesion layer between Pt (bottom electrode) and SiO2. Recently I am trying SiNix/Si wafer, the engineer recommend me Pt/Ta instead of Pt/Ti,...
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As I read in a paper, many people tend to add some O2 to Ar. What is the effect compared with pure Ar? PZT is not metal, so it can not be regarded as reactive sputtering. Does it help to increase...
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I have been curious about it for quite a while. After some period of sputtering, the surface of target(Pb1.1Zr0.52Ti0.48) will be change into some dark and gold color rings. I think it may be due...
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