Bin Xiong

3 Questions 7 Answers 0 Followers

Questions related from Bin Xiong

Ta as adhesion metal between Pt and silicon nitride - any thoughts?

Usually on SiO2/Si substrate, I usually 30nm Ti as adhesion layer between Pt (bottom electrode) and SiO2. Recently I am trying SiNix/Si wafer, the engineer recommend me Pt/Ta instead of Pt/Ti,...

21 July 2014 7,012 1 View

Why do some people add 5~10% O2 to Ar when they sputter PZT material?

As I read in a paper, many people tend to add some O2 to Ar. What is the effect compared with pure Ar? PZT is not metal, so it can not be regarded as reactive sputtering. Does it help to increase...

16 April 2014 5,613 3 View

Does anyone have experience with sputtering target (PZT) surface transformation? (Picture Attached)

I have been curious about it for quite a while. After some period of sputtering, the surface of target(Pb1.1Zr0.52Ti0.48) will be change into some dark and gold color rings. I think it may be due...

07 March 2014 9,367 23 View