Has anyone used Nanoimprint lithography for imprinting structures under 30nm(height)? If yes, which resist and what parameters?

I am trying to imprint nanostructures onto gold evaporated surface. I am using MR 7020R from Micro resist GmbH(diluted) to get 100nm resist coating . I am having trouble etching the resist...

11 November 2017 10,003 0 View