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Questions related from Aniruddh Shekhawat
System : Si/or Ge:substrate (200microns) HfO2: Deposited by ALD (10-15nm) Top metal electrode, TiN: In-situ ALD deposited (15nm) Therefore, final system is: TiN(15nm)/ HfO2(15nm)/Si(200microns)...
12 December 2017 9,881 2 View