why we use two different masks for gate(s/d) and gate (s/d) pad in HEMT fabrication.
Gate material is schottky metal and Source/ Drain are ohmic metal.
So, why there is distinguish between (G/S/D) contact and there pads.
As the metal stack of the gate contact and gate pad are same.
Please help me, I have stucked here while designing the mask.
In advance thanks.
Hi Shub
Three photomasks are normally required for HEMT structure: one mask for the formation of the source and the drain, a second and a third mask for the formation of the T-gate structure. Two Gate-Masks are used to: form a gate masking layer over the surface, and form a gate opening through the T-shaped gate layer.
Cheers; Happy New Year
Thanks Sir, for your promt reply, but I was not interested in T-gate.
I was asking about it is compulsory to have different mask for pads and contact.
Please anyone tell me that is it compulsory to have different, mask set for pads and contact individually.
Thanks in Advance
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