Which photoresists can give thickness of 1-5 microns and have good etch resistance?

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Fei Gao

I guess that also depends on what gas you will use for etching. And which tone you need. Check SU-8. It is a negative tone resist. http://www.microchem.com/pdf/SU-82000DataSheet2000_5thru2015Ver4.pdf

Ravi Kumar Ch

i am looking for a positive tone resist with etch resistance to argon plasma and also Au/Cu etchant.