Hello everyone.
For my experiment, I have a need of moving a ~20 mg optical element (prism) at frequencies of ~2 MHz with amplitudes of ~0.5 μm.
I couldn't find any proper device which can fit these requirements. It appears that a regular piezo won't work since it's displacement in these frequencies ranges in tens of nm. Not sure if MEMS is applicable, but from what I know, they don't provide needed. Magnetic forces from electromagnets are too weak at these frequencies (in case of covering prism with ferromagnetic).
Has anyone faced a similar problem and solved it?
It seems quite challenging, maybe even impossible.
One can estimate required force, peak velocity and reactive power involved.
Let's say displacement A =0.5um, m =20mg = 20*10-6 kg
If we introduce w = 2*pi *f =6.23*f , where f =2 MHz:
Peak acceleration force required: F = m*A*w^2 = 155 N
Peak velocity : v = A*w = 6.2 m/s
Reactive power involved P = F*v = 9.6 kWt
The quartz resonator (providing lateral displacement however) at 2MHz would have thickness of ~800um. It may have high q -factor (e.g. 10e4) therefore required RF power and dissipated power might be p P/q =1W. That is however still well above typical excitation power used with quartz resonators - I am not sure it is going to withstand it. However, some pulsed operation mode might be possible.
Also, one may consider resonant ceramic, e.g. like the actuator below, however the q-factor of such ceramic very low, it will require very strong drive and likely can destroy itself even in pulsed operation
https://www.steminc.com/PZT/en/piezoelectric-disc-6mm-2-mhz
ttps://www.steminc.com/PZT/en/piezoelectric-disc-2-mhz
I think maybe you can benefit from a
UTAF MICRO MOTOR TECHNOLOGY technique
@Hayder_Naser5, thank you for your answer. But M3-L MICRO LINEAR ACTUATORs speed is not enough to provide desired frequency.
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