I have two different films of BaTiO3 (5 nm) on silicon and LuMnO3 (200 nm). My intention is to define patterns on the surface of the films in order to perform electric poling on a area of 1 micron2, then take the sample to SEM and look at the same region. We have electron lithography system in SEM machine, however I do not know neither anyone else in group how to prepare polymer on the film and which polymer I have to use for patterning, it should be thin enough not to interfere with AFM/PFM tip. Is there any comment? Thanks.

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