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Probably, shifting of D band towards higher frequency implies the introduction of graphitic nature into the material. Further, change in FWHM implies the introduction of disorderness or impurities.

Hope this helps you.

Hello. When you have D lines at Raman of H-DLC substrates you must have a peak about 1350-1417 cm-1 .Shifting towards higher frequency or lower one will take place if you use different conditions. for example time, temperature, etc.

It's obvious that your shifts are because of time of scanning and maybe because of hotspots in your sample.