In High Power Microwave devices like Gyrotron, what material is used for RF windows now a days, as Beryllia is poisonous?
The best (but most expensive) are CVD diamond windows, owing to highest thermal conductivity. Please see e.g. the recent comprehensive review article devoted to the Gyrotron's 50th anniversary.
Article The Gyrotron at 50: Historical Overview
Sapphire windows are commonly used for gyrotrons.
Diamond material could be used to design an RF window for high power (both kW and MW) gyrotrons.
Alumina, beryllia, which has a very high thermal conductivity, sapphire, which is extremely low-loss and has high strength, or CVD diamond.
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