What is the difference or advantage of HfO2 and ZrO2 as a high k dielectric material? Which is prefered as best?

15 June 2016 1 7K Report

Dielectric constant value for ZrO2 and HfO2 seems to be same. What is the advantage of Hfo2 and ZrO2 as dielectric material?

Giho Seo

HfO2 has several advantages against ZrO2 in MOSFET application.

1. Low leakage current

- The reason is not definite, but higher band offset with metal electrode of HfO2 can be one of the answer.

2. Stoichiometric Hf-silicate layer

- This can be refered as last studies on HfO2 interface stability with SiO2

The more information about this comparison is to be found by scholar searching.

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