I am performing C-V using SPA on two In contacts made on ZnO film. At first, it was observed to give a step increase in capacitance as the applied voltage is changed from negative to positive. After annealing these samples in vacuum, the capacitance dips near the transition of voltage from negative to positive and than returns to same capacitance level as voltage is further increased. It is baffling me, because both nature of capacitance represent very different film and contact properties. Please suggest what could be a probable reason for such capacitance in ohmic contacts, which is repeatedly confirmed by I-V measurements.

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