It typically involves steps including adsorption of oxygen, nucleation, and growth of the oxide phase. At the initial stage, oxygen molecules adsorb onto the metal surface and dissociate into atoms. These oxygen atoms then diffuse into the metal lattice, forming an oxide layer. The oxidation kinetics are influenced by temperature, with higher temperatures generally increasing the diffusion rate of oxygen atoms and metal cations. This leads to the formation of different morphologies, as observed with cobalt films oxidized at 400 °C (nanowalls) and 500 °C (nanograins). The energy factors controlling this process include activation energy for oxygen adsorption and diffusion, surface energy of different crystallographic planes, and the Gibbs free energy changes associated with the formation of different oxide phases. These factors collectively dictate the nucleation sites, growth rates, and resultant morphology of the oxide thin films.

Dear @Aneeza Arshad thank you for reply. Can you suggest me a good paper which show how these parameter effects the morphology.