03 September 2022 1 2K Report

We use Pfeiffer DCU Turbo molecular pump for our magnetron sputtering system. After an unforeseen power outage, unfortunately, the pump has malfunctioned and displayed Error e117. I searched through the manual, but surprisingly that error code is not mentioned.

Is anybody familiar with that error and its meaning? Thnx

More Osama Nasr's questions See All
Similar questions and discussions