As in GaN after annealing the quality of gold markers degrades, how can I keep my markers quality same as before or improve it after annealing process?
The following link may answer your question:
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10248/102480R/Multilayer-porous-structures-on-GaN-for-the-fabrication-of-Bragg/10.1117/12.2266280.short?SSO=1
Have you tried different cooling rate after annealing. Use different cooling rate, probably it will help. Because GaN has wurzite and Au had fcc crystal structure. How much strain you have in you sample? Try to use any HCP metal with more or less same lattice parameter as GaN . Along in which plane you have grown GaN and Au?
Try using a high temp metal such as Pt instead. Or you can use an etch to define your marks.
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