Hello Everyone!

We have Intellisuite tool, where we can easily simulate the conventional 2D-Lithography with vertical sidewalls and also study the morphology of Si after etching. But, we would like to simulate 3D Grayscale Lithography with 3D photoresist structure(for example a convex lens or a pyramid structure) and study the resultant morphology in Si after RIE. Is there any tool to achieve it? Thanks in advance!!

Best regards,

Isman Khazi