Dear Hossien,

You haven't completely described the design of your plasma source, but I guess, from what you have mentioned, it is a plasma source with Dielectric Barrier Discharge. One simple way is to introduce your precursor (TEOS in your case) carried by a carrier gas along with feed gas in the plasma discharge zone. The other way is to use a spray method to mix your precursor with the plasma jet in the post-discharge zone.

You might might this paper reported on plasma deposition of TiO2 useful:

Article Atmospheric Pressure Plasma Deposition of TiO2: A Review

Also, you can find some design of the source setup in this paper useful:

https://iopscience.iop.org/article/10.1088/1361-6463/aab8f0/meta

Good luck!

Dear Pitambar

Thank you so much for your reply, My goal is production and dissemination SIO2 so I made DBD system (2KV AC-500mA), and I could see the plasma above on the quartz glass.

Other hand we must transfer this plasma from top of the glass to the tip of the nozzle and we need to transfer the TESO to the tip of the nozzle with a separate tube to combine with ozone.

There is some question : Do I need Helium?

What is the way to transfer plasma from inside the tube to the nozzle head?

Does it mechanism work?

Dear Hossien,

Studies have shown that the plasma jet created in between your electrodes follow the fed gas (He as for example) flow. Check out this paper for details on how plasma jet follows the gas flow:

Article Interferometry of plasma bursts in helium atmospheric-pressu...

So, if you use some gas to flow through your tube, you should be able to transfer plasma from inside the tube to the nozzle.

I am not sure what type of reaction are you looking for here. Also, I am not clear how you want to use plasma for your case. But, I guess you want to use plasma to produce reactive species from ozone to react with TESO to form SiO2. If that is the case, you can simply flow the mixture of He and ozone through the plasma tube. Now, you have 2 options how you want to have the plasma react with TESO.

If you want to react the plasma species with TESO outside of the discharge zone, you can spray TESO just outside of the nozzle. Check this paper for this type of design:

Article Highly efficient photocatalytic TiO2 coatings deposited by o...

The other option is to break down your precursor inside the discharge zone with plasma and carry out along with other plasma species. These reactive plasma species and fragments from your precursor react forming SiO2 and deposit on your target. Check out this paper where precursor is introduced inside the discharge zone.

https://iopscience.iop.org/article/10.1088/0022-3727/42/3/032001/meta

Good luck!