I made a perovskite film and it is a sample where different phases coexist. So, I want elemental mapping for Cesium, Chloride, Iodide. The size of grain is less than 300nm and the sample is unstable in high kV so it is hard to use FE-SEM EDS. Also, it is hard to use TEM(the process is difficult and complicated). What equipment should I use to analyze the elements under these conditions? If the elemental analysis is difficult, I would like to show the relative ratio between elements or different phases' coexistence through images(not SEM, using electroluminescence, photoluminescence analysis doesn't matter)
Dear Jason Choi,
Laser-induced breakdown spectroscopy is a useful technique for elemental analysis. Please go through the attached articles for reference.
I think you could try TERS method: a combination of Raman and AFM, when analyzed area can be reduced by the tip enhanced Raman effect. The lateral resolution for this method reaches 20nm.
https://www.ntmdt-si.com/resources/applications/an101d-ters
There are two possible methods that hold the potential to give the needed resolution:
Backscatter FESEM and Computed X-Ray Tomography (CT). Both methods use elemental density to distinguish elements that exist in phase morphology.
I used Backscatter FESEM to distinguish 20nm gold particles in an immunolabled biological. The technique is quite sensitive to elemental density differences and has the resolution to do what you want to do
High resolution CT may also do what you are trying to do. It also uses elemental density to distinguish elemental make-up, but without the need for SEM vacuum. It works down to the nm resolution level.
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