Light elements such as C, B, N, O require standardization which can be done by correction of SEC parameter. If you have a sample with satisfactory purity and stoichiometric composition you can use it as the nitrogen content standard.

Thanks sir. But SEM handling people did have BN standard samples for comparison. From your answer can I consider EDAX as proof of nitrogen incorporation though percentage is not accurate.

You must remember that EDS is only microanalysis and it doesn't consider any inhomogeneity of tested material. Moreover, for light elements you should use standards with composition close to expected in your samples. In the case of InSbN it is around 33 at.%.

Thanks, Tomasz and Sebastián.

I will try XPS.

Meanwhile, I tried WDS. This is giving percentage accurately. Only question in this technique is, if any other impurity is present, then it will not be determined. because the machine characterizes only for the materials mentioned and will miss any unknown impurity.