I am in the Ion Beam analysis field and we are in the process of developing a new standard sample for the calibration of our chain of detection. For this sample, we need a semi-thick layer of SiO2 (about 250 nm) that we can easily thermally grow on a Si wafer, but we also need two thin layers (about 25 nm each) of heavy material on the top of it.

Previously we have tried a top layer of gold with an interlayer of Ni, but it doesn't work very well since the wettability of Ni on SiO2 is not very good. Therefore we have delaminated layers on the top of the SiO2 layer, which we want to avoid.

Could someone kindly advise me on which material would give us better results? From our point of view, the interlayer could be anything between Ti and Br, and the top layer should be something very heavy (i.e. Ta, W, Au or Pb?).

Thanks beforehand for your help.

Similar questions and discussions