How to remove photoresist completely?

Park Jaehyeong @Park-Jaehyeong

15 March 2023 1 6K Report

I want to share your know-how about remove the photo resist after lithography.

since know, i use acetone and pr stripper. But i think there is pr residue after using

acetone(and stripper).

Are there anything else i can additionally do to use acetone(and stripper)?

Redouane Nedjar

Photoresist is a light-sensitive material used in the production of printed circuit boards, semiconductors, and other electronic components. Removing photoresist after it has been used can be a challenging process, but there are several methods that can be used to remove it completely. Here are some of the most common methods:

Chemical Stripping: One of the most effective ways to remove photoresist is by using a chemical stripper. This method involves immersing the material in a solvent that dissolves the photoresist. Common solvents used for this purpose include acetone, methylene chloride, and sulfuric acid.

Plasma Ashing: Plasma ashing is another effective method for removing photoresist. This method involves exposing the material to a low-pressure plasma that breaks down the photoresist and converts it into a gas that can be easily removed. Plasma ashing is often used in semiconductor fabrication and other high-tech applications.

Mechanical Stripping: Mechanical stripping involves physically removing the photoresist by scrubbing or blasting it with a high-pressure jet of water or other abrasive material. This method is typically used for larger-scale applications such as printed circuit board manufacturing.

Thermal Stripping: Thermal stripping involves exposing the material to high temperatures that cause the photoresist to break down and vaporize. This method is often used for low-volume applications or when other methods are not effective.

When selecting a method for removing photoresist, it's important to consider the type of material being used, the application, and any environmental or safety concerns. It's also important to follow proper safety procedures and guidelines when handling and disposing of chemical strippers or other hazardous materials.

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