When taking force-distance curves, or approaching a sample in contact mode, with soft silicon cantilevers on a variety of samples, such as standard calibration grids, significant cantilever deflection is observed already far from the contact, that most probably comes from the electrostatic charges.

As a result, cantilever becomes significantly bent even with low set point.

Any ideas on how to remove the electrostatic charges from Si cantilevers/tips?

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