Hello

I have a question about liquid type of Tetrakis(ethylmethylamido)hafnium (for ALD).

I will handle it into glove box which able to serve Ar atmosphere without oxygen neither H2O.

A rubber syringe and steel needle are used for carrying to ALD precursor bottle.

I´m bit worried about this materials because it is hard to find information about how to handle this materials through internet (or youtube) compared to TiCl4.

I´m happy to get any opinion and way to handle within safty.

Thanks in advance