The software mainly used for that is SRIM (The Stopping and Range of Ions in Matter). If you google for SRIM you will immediately find the web pages. Please note that there is some arbitrariness on which parameters have to be used in SRIM calculations. You will find recommendations for that in the attached paper by Stoller et al. Good luck. Frank
The software mainly used for that is SRIM (The Stopping and Range of Ions in Matter). If you google for SRIM you will immediately find the web pages. Please note that there is some arbitrariness on which parameters have to be used in SRIM calculations. You will find recommendations for that in the attached paper by Stoller et al. Good luck. Frank
As Frank says: use SRIM. Note that the damage levels SRIM gives in its graph of damage vs depth are in rather strange units of "displacements per (Angstrom-ion)". You will need the atomic density of the target (atoms per unit volume) and the ion fluence (usually in ions per m^2 or cm^2) to convert this to dpa.
dpa = displacements per (Angstrom-ion) x fluence / (atomic density of the target )