How can we find the defects in the Multilayerd thin films usually in Metals/Ceramic like structure using XRD data?

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Oleksiy V Penkov

Actually, yes. You could measure the strain by XRD and Young's Modulus by nanoindentation. Based on these two data, you could calculate the residual stress. Another way - use the Stoney's equation.

Krishnanand Shukla

ThankS Sir! for your reply.

I tried by this mathod but answer is not ok. So can you send me the article related to the Stoney's Equation.

Naresh Kumar Maroju

Hello,

Please refer the following papers

Article Celebrating the 100th anniversary of the Stoney equation for...

Article Evaluation of Stoney equation for determining the internal s...