My sample is GaN on sapphire substrate. It is taking lot of time in cutting, lapping, dimpling etc processes. Which material should use for lapping the sample. I have SiC (silicon carbide) lapping paper but i think, sapphire is harder then SiC so it takes much time in lapping. Anyone who have worked on GaN sample please Suggest me which material paper should be use for this. Can FIB technology use for thining the sample?

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