High sensor accuracy in Micro-electro-mechanical systems (MEMS) is achieved via their structural design, material selection, and fabrication optimization, reducing noise and disturbances. Advanced precision in fabricating techniques, such as etching and photolithography, ensures consistent sensor size and accuracy. By combining advanced material science techniques to improve the micro-chip's mechanical and electrical properties, signal reliability increases, and sensor drift decreases. Ameliorating micromechanical and electronic chip noise and signal sensitivity can also be achieved by incorporating signal conditioning circuits directly onto the MEMS chip. Consistent sensor temperature compensation, calibration, and using extra sensing elements are ways of improving sensor accuracy. In conclusion, achieving a high level of precision sensors requires a multidisciplinary approach that combines mechanical engineering and electronics to incorporate the best designed MEMS sensors.