Hi everyone, I want to know the ratio of (lattice oxygen : oxygen vacancy : hydroxyl group) of sample which I have.
So, I tried to deconvoluting the O(1s) XPS spectrum using 3 Gaussian fitting but I can't find the exact value of binding energies.
Actually, I can deconvolute the sample which have ratio of Y2O3 100% : Al2O3 0% - Set the Gaussian center using Yttrium-Oxygen binding energy, etc.
But I don't know how to set the Gaussian center(x position) in case of Y2O3 - Al2O3 mixture sample. Do I need to use 6 Gaussian fitting(Al-O , Al-Vacancy , Al-OH , Y - O , Y-Vacancy , Y - OH)?