I experienced that high vacuum coater is not deposing carbon onto the grids. Our coater is operating under two modes - as "flash mode" or "pulse mode". The former is working properly but the later one is not deposing carbon. I just can see the flashes repeating in time and quartz is counting the carbon layer but there is no carbon on the grids at the end.
Have you experienced this? How could I solve this problem?
Thank for any help.
Lenka
Simone Vezzù
Hi Lenka,
take care that there are no shortcuts at the sputter source. Typically they can happen with Carbon target and can be caused by dust or small particles between clamping ring and shutter.
bye
Simone
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